Publications
Eric R. Marsh. Ultra-precision spindle metrology. LiPICo Press, 2007.
Eric R. Marsh. Smart spindles: instrumentation for real time process monitoring. In Proc. of American Society for Precision Engineering 2007 Summer Topical Meeting, 2007. Eric R. Marsh and David A. Arneson. Effects of externally-pressurized air bearing supply gas on asynchronous error motion. Precision Engineering, 2007.
Eric R. Marsh, Jeremiah A. Couey, R. Ryan Vallance, and Allen A. Li. The role of crystallographic orientation on the forces generated in ultra-precision grinding of anisotropic materials such as monocrystalline silicon. International Journal of Manufacturing Technology and Management, 12(1-3):270– 283, 2007.
Christopher J. Morgan, R. Ryan Vallance, and Eric R. Marsh. Design and modeling of a kinematically-constrained traction drive spindle for micro machining. In Proc. of American Society for Precision Engineering 2007 Summer Topical Meeting, 2007.
Michael W. Olson, David A. Arneson, Melvin J. Liebers, and Eric R. Marsh. Effects of gas composition onasynchronous error motion in externally-pressurized spindle. In Proc. of American Society for Precision Engineering 2007 Summer Topical Meeting, 2007.
John A. Patten and Eric R. Marsh. Semiconductor Machining, chapter Numerical simulations and experiments on machining of semiconductors and ceramics. Applied Physics Book Series by Research Signpost, 2007.
R. Ryan Vallance, Behnoush Haghighian, and Eric R. Marsh. A unified geometric model for designing elastic pivots. Precision Engineering, 2007.
Chunhe Zhang, Allen Y. Yi, R. Ryan Vallance, and Eric R. Marsh. Ultra-precision micromachining of micro-fluidic devices by use of a high-speed air-bearing spindle. In Proc. of American Society for Precision Engineering, 2007 Summer Topical Meeting, 2007.
Eric R. Marsh, David A. Arneson, Matthew J. Van Doren, and Scott A. Blystone. The effects of spindle dynamics on precision flycutting. Sensor Review, 2006.
Eric R. Marsh, Jeremiah A. Couey, and R. Ryan Vallance. Nanometer-level comparison of three spindle error motion separation techniques. ASME Journal of Manufacturing Science, 128(1):180–187, 2006.
Eric R. Marsh, Jeremiah A. Couey, R. Ryan Vallance, and Allen A. Li.The role of crystallographic orientation on the forces generated in ultra-precision grinding of anisotropic materials such as monocrystalline silicon. Journal of Manufacturing Management, 2006.
Eric R. Marsh, David C. Schalcosky, Jeremiah A. Couey, and R. Ryan Vallance. Analysis and performance of a parallel-axis flatness measuring instrument. Review of Scientific Instruments, 77(2), 2006. Article 025105.
Christopher J. Morgan, R. Ryan Vallance, and Eric R. Marsh. Tools for micron scale machining. Nanomachining, 2006.
Tony A. Schmitz, Jeremiah A. Couey, and Eric R. Marsh.The role of cutter eccentricity on surface topography and milling forces. International Journal of Machine Tools and Manufacture, 2006.
J. Jacob, John A. Patten, B. Bhattacharya, Jeremiah A. Couey, and Eric R. Marsh. Determination of the ductile to brittle transition depth of cut in 6h silicon carbide through flycutting. In American Society for Precision Engineering 2005 Annual Meeting, 2006.
Eric R. Marsh and R. Ryan Vallance. Analysis and performance of a parallel-axis flatness measuring instrument. In American Society for Precision Engineering 2006 Annual Meeting, 2006.
Eric R. Marsh and R. Ryan Vallance. The role of crystallographic orientation on the forces generated in ultra-precision grinding of anisotropic materials such as monocrystalline silicon. In American Society for Precision Engineering 2006 Annual Meeting, 2006.
R. Ryan Vallance and Eric R. Marsh. Flexures. In American Society for Precision Engineering 2006 Annual Meeting, 2006.
R. Ryan Vallance and Eric R. Marsh. Micro roundness instrument. In American Society for Precision Engineering 2006 Annual Meeting, 2006.
Jeremiah A. Couey, Eric R. Marsh, Byron R. Knapp, and Ryan R. Vallance. Monitoring force in precision cylindrical grinding. Precision Engineering, 29(3):307–314, 2005.
Jeremiah A. Couey, Eric R. Marsh, Byron R. Knapp, and Ryan R. Vallance. In-process force monitoring for precision grinding semiconductor silicon wafers. International Journal of Manufacturing Technology and Management, 7(5-6):430–440, 2005.
A. Khan, R. Ryan Vallance, and Eric R. Marsh. Shape memory alloys for actuating nano positioners with elastic bearings. In American Society for Precision Engineering 2005 Annual Meeting, 2005.
Eric R. Marsh, David A. Arneson, Matthew J. Van Doren, and Scott A. Blystone. The effects of spindle dynamics on precision flycutting. In American Society for Precision Engineering 2005 Annual Meeting, 2005.
Eric R. Marsh, Jeremiah A. Couey, and R. Ryan Vallance. Nanometerlevel comparison of three spindle error motion separation techniques. In American Society for Precision Engineering 2005 Annual Meeting, 2005.
Robert D. Grejda, Eric R. Marsh, and R. Ryan Vallance. Techniques for calibrating spindles with nanometer error motion. Precision Engineering, 29(1):111–123, 2005.
Byron R. Knapp and Eric R. Marsh. On the design and implementation of an instrumented grinding testbed. Sensor Review, 25(2):155–161, 2005.
Eric R. Marsh, Jeremiah A. Couey, and R. Ryan Vallance. Roundness measurement of spherical artifacts at arbitrary latitudes. Precision Engineering, 2005.
Eric R. Marsh, Binu P. John, Jeremiah A. Couey, J Wang, and Robert D. Grejda. Predicting surface figure in diamond turned calcium fluoride using in-process force measurement. Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, 23(1):84–89, 2005.
Brian P. OConnor, Eric R. Marsh, and Jeremiah A. Couey. On the effect of crystallographic orientation on ductile material removal in silicon. Precision Engineering, 29(1):124–132, 2005.
Phillip T. Smith, R. Ryan Vallance, and Eric R. Marsh. Correcting capacitive displacement measurements in metrology applications with cylindrical artifacts. Precision Engineering, 29(3):324–335, 2005.
Eric R. Marsh and R. Ryan Vallance. Force sensors in monitoring precision grinding. In SPIE Optifab 2005, Rochester, New York, 2005.
Vallance R. Ryan Morgan, Christopher J. and Eric R. Marsh. Micro grinding blind holes in hard tungsten carbide with polycrystalline diamond micro tools. In American Society for Precision Engineering 2005 Annual Meeting, 2005.
Phillip T. Smith, Christopher J. Morgan, I. Omer, Ryan R. Vallance, and Eric R. Marsh. Design and manufacture of a capacitance probe for hole metrology. In American Society for Precision Engineering 2005 Annual Meeting, 2005.
R. Ryan Vallance, Eric R. Marsh, and Phillip T. Smith. Effects of spherical targets on capacitive displacement measurements. ASME Journal of Manufacturing Science, 126(4):822–829, 2005.
R. Ryan Vallance, King-Fu Hii, Robert D. Grejda, and Eric R. Marsh. Error motion of a kinematic spindle. Precision Engineering, 28(2):204–217, 2004.
R. Ryan Vallance, Christopher J. Morgan, Shelby M. Shreve, and Eric R. Marsh. Micro tool characterization using scanning white light interferometry. Micromechanics and Microengineering, 8:1234–1243, 2004.
Jeremiah A. Couey, Eric R. Marsh, and R. Ryan Vallance. A comparison of force and acoustic emission sensors in monitoring precision cylindrical grinding. In American Society for Precision Engineering 2004 Annual Meeting, pages 105–108, 2004.
Eric R. Marsh, Jeremiah A. Couey, and Binu P. John. On the tool wear and subsurface damage of single point diamond turning calcium fluoride. In American Society for Precision Engineering 2004 Annual Meeting, pages 502–505, 2004.
Tony L. Schmitz, Jeremiah A. Couey, Eric R. Marsh, and M. Tummond. The role of cutter eccentricity on surface finish and milling forces. In Proceedings of ASME International Mechanical Engineering Congress and Exposition, 2004.
R. Ryan Vallance, Eric R. Marsh, and Phillip T. Smith. Effects of targeting spherical surfaces with capacitive displacement sensors. In American Society for Precision Engineering 2004 Annual Meeting, pages 454–457, 2004.
R. Ryan Vallance, Christopher J. Morgan, Shelby M. Shreve, and Eric R. Marsh. Characterizing form and waviness and roughness of micro edm electrodes. In American Society for Precision Engineering 2004 Annual Meeting, pages 709–712, 2004.
Alexander H. Slocum, Murat S. Basaran, R. Cortesi, and Eric R. Marsh. Modular od/id grinding machine with bearings preloaded by inclined iron core linear electric motor. In Proc of the European Society of Precision Engineering (euspen), 2003.
Eric R. Marsh and Vincent C. Vigliano. Ultraprecion bearing metrology. In Proc of the Roller Bearing Metrology Group/ASTM, 2002.
Byron R. Knapp and Eric R. Marsh. Predicting the rotational accuracy of hydrostatic spindles. In American Society for Precision Engineering 2001 Summer Topical Meeting, pages 52–55, 2001.
Byron R. Knapp, Eric R. Marsh, Robert D. Grejda, and David C. Schalcosky. Superabrasive grinding process optimization through force measurement. In American Society for Precision Engineering 2001 Annual Meeting, pages 58–61, 2001.
Brian P. OConnor, Robert D. Grejda, Byron R. Knapp, and Eric R. Marsh. Single point diamond machining of silicon. In American Society for Precision Engineering 2001 Annual Meeting, pages 461– 465, 2001.
Vincent C. Vigliano and Eric R. Marsh. Testing with a precision bearing analyzer. In American Society for Precision Engineering 2001 Summer Topical Meeting, pages 109–113, 2001.
Linda M. Hanagan and Eric R. Marsh. Active control of floor vibration. In Proceedings of SPIE–The International Society for Optical Engineering, pages 1341–1347, 2000.
Byron R. Knapp, Brian P. OConnor, and Eric R. Marsh. Characterization of porous graphite air bearings. In American Society for Precision Engineering 2000 Annual Meeting, pages 211–214, 2000.
Eric R. Marsh. Instrumentation for precision grinding of difficult materials. In Proc of the 2000 NSF Design and Research Conf, 2000.
Eric R. Marsh and Robert D. Grejda. air bearing spindle instrumentation for diamond grinding of ceramics. In Intertech 2000, 2000.
Vincent C. Vigliano and Eric R. Marsh. The design and use of a precision bearing analyzer. In American Society for Precision Engineering 2000 Annual Meeting, pages 409–412, 2000.
Eric R. Marsh and Robert D. Grejda. Experiences with the master axis method for measuring spindle error motions. Precision Engineering, 24(1):50–57, 2000.
Eric R. Marsh and Robert D. Grejda. Air bearing spindle instrumentation for precision grinding of ceramics. Finer Points, page 6, 2000.
Eric R. Marsh, Robert D. Grejda, and Byron R. Knapp. Superabrasive grinding process optimization through force measurement. Abrasives, pages 29–33, 2000.
Byron R. Knapp and Eric R. Marsh. Benefits of variable speed grinding. In American Society for Precision Engineering 1999 Annual Meeting, pages 115–118, 1999.
Eric R. Marsh and Robert D. Gredja. Air bearing spindle instrumentation for precision grinding of ceramics. In Ceramic Engineering and Science Transactions (ACerS), volume 102, pages 17–26, 1999.
Eric R. Marsh and Robert D. Grejda. Experiences with the master axis method for measurement of spindle error motion. In American Society for Precision Engineering 1999 Annual Meeting, pages 405–408, 1999.
Eric R. Marsh, Robert D. Grejda, and Donald L. Martin. Experiences with the master axis method for measuring spindle error motions. In Proc of the 1st EUSPEN Conf., pages 171–174, 1999.
Byron R. Knapp and Eric R. Marsh. Design and testing of a capacitance probe calibrator. In American Society for Precision Engineering 1998 Annual Meeting, pages 449–452, 1998.
Eric R. Marsh, Robert D. Grejda, David A. Arneson, Melvin A. Liebers, and Donald L. Martin. Instrumented testbed for precision grinding. Abrasives, pages 36–46, 1998.
Eric R. Marsh and Layton C. Hale. Damping of flexural waves with imbedded viscoelastic materials. ASME Journal of Vibration and Acoustics, 120(1):188–193, 1998.
Eric R. Marsh, Benjamin J. Maher, and Carl L. White. Modeling of silicon wafer vibration in semiconductor process tools. Journal of Sound and Vibration, 210(2):231–241, 1998.
Eric R. Marsh and Adam J. Schaut. Measurement and simulation of regenerative chatter in diamond turning. Precision Engineering, 22(4):252–257, 1998.
Eric R. Marsh, David S. Yantek, Matthew A. Davies, and David E. Gilsinn. Simulation and measurement of chatter in diamond turning. ASME Journal of Manufacturing Science and Engineering, 120(2):230– 235, 1998.
Eric R. Marsh and David S. Yantek. Experimental measurement of precision bearing stiffness. Journal of Sound and Vibration, 202(1):55–66, 1997.
Byron R. Knapp and Eric R. Marsh. Experimental verification of a grinding chatter model. In American Society for Precision Engineering 1997 Annual Meeting, pages 101–105, 1997.
Eric R. Marsh and Donald L. Martin. Instrumented air bearing spindle for precision grinding. In Proc of the Intl Conf On Precision Engineering, pages 141–146, 1997.
Eric R. Marsh, Donald L. Martin, David A. Arneson, and Melvin L. Liebers. Instrumented air bearing spindle for precision grinding. In Proc 1997 Int Conf on Precision Eng, volume 1, pages 141–146, 1997.
Thomas B. OReilly and Eric R. Marsh. An orthogonal cutting stability model with variable delay length due to tool motion. In American Society for Precision Engineering 1997 Annual Meeting, pages 151–156, 1997.
Adam J. Schaut and Eric R. Marsh. Effects of round-nosed tools on chatter in diamond turning. In American Society for Precision Engineering 1997 Annual Meeting, pages 111–115, 1997.
David S. Yantek, Eric R. Marsh, Matthew A. Davies, and David E. Gilsinn. Simulation and measurement of chatter in diamond turning. In Proc 1997 ASME Manufacturing Science and Technology Conf, 1997.
Andrew D. Devitt and Eric R. Marsh. An investigation into high stiffness adjustable natural frequency hydrostatic slide units. In Proc of the 1996 ASPE Meeting on Precision Grinding of Brittle Materials, pages 12–16, 1996.
James D. Flinchbaugh and Eric R. Marsh. Grinding machine technology required to achieve ductile regime ceramic grinding. In Proc of the 1996 ASPE Meeting on Precision Grinding of Brittle Materials, 1996.
Eric R. Marsh. Dynamic analysis of machine tools. In Proc of Soc of Manufacturing Engineers Advances in Precision Machine Design Conf., 1996.
Eric R. Marsh and David S. Yantek. The role of loop stiffness in centerless grinding. In Proc of the 1996 ASPE Meeting on Precision Grinding of Brittle Materials, pages 16–21, 1996.
Eric R. Marsh and Alexander H. Slocum. An integrated approach to structural damping. Precision Engineering, 18(2/3):103–109, 1996.
Paul A. Scagnetti, Eric R. Marsh, and N. Staedke. A new method for improving dynamic stiffness of advanced ceramic structures. In American Society for Precision Engineering 1995 Annual Meeting, pages 322–328, 1995.
Paul A. Scagnetti, Eric R. Marsh, N. Staedke, and Alexander H. Slocum. Shear damping of advanced ceramic structures. In Proc of the Int Symp on Advanced Ceramics for Structural and Tribological Applications, pages 343–353, 1995.
Alexander H. Slocum and Eric R. Marsh. A new damper for machine tool structure: the replicated internal viscous damper. Precision Engineering, 16(3):174–183, 1995.