Summary

Piezoelectric substrates and thin films have been extensively investigated and demonstrated in many high-performance RF Applications. Currently, micromachining techniques are being extended to include several novel materials such as piezoceramics and thin films. Using such emerging techniques, it is now possible to fabricate micromachined piezoelectric micron-sized freestanding structures, which can be configured to realize unique resonator and switch designs suitable for high-frequency RF applications. Such piezoelectric MEMS resonators and switches will enable RF and IF filtering for effective operation over a broad spectrum within the extremely small size and low power constraints. Effective RF preselectors are needed at the front end of the receiver to insure effective multi-octave frequency coverage. The use of RF filterbanks may be considered to allow the sensors to receive each individual signal within a dense environment. Piezoelectric MEMS technology can be applied to provide suitable low loss, low power switching of filters and also in realizing the resonators for the filters.

Collaborators
 
Srinivas Tadigadapa, Penn State University

Susan Trolier-McKinstry, Penn State University

For further information:  cdrahn@psu.edu. 

Copyright © 2001 Mechatronics Research Laboratory